A Mems Singlet Oxygen Generator

The design, creation, and demonstration of a singlet oxygen generator (SOG) that operates on the microscale are presented. The micro singlet oxygen generator (μSOG) chip creates singlet delta oxygen (O2(Δ)) in an array of packed bed reaction channels fed by inlets with pressure drop channels to equalize flow. An integrated capillary array separates the liquid and gas byproducts, and microscale cooling channels remove excess heat of reaction. The fabrication process and package are designed to minimize collisional and wall deactivation of O2(Δ). Flow behavior and capillary separation are characterized over a range of plenum (gas outlet) pressures and feed rates. The testing setup enables measurement of O2(Δ) via optical emission measurements and mass spectrometry. Spontaneous decay of the O2(Δ) molecule into its triplet state is observed, confirming the production of O2(Δ).